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Electro pneumatic high vacuum isolation valve (Angle Valve)
Unique Vacuum    Unique Vacuum
This electronic and pneumatic high vacuum damper valve(Angle Valve) is sealed by sylphon and signaled by electrical signal as the valve switch and depended on the compressed air as the motive force to open or close the valve. The valve will be relied on the spring to close the valve automatically when losing power supply or the compressed air. To be the on and off mechanism in the high vacuum tube, such valve is advantageous in operating steady and reliable with long life span, which can be the top choice within the automatic vacuum facilities. Applicable medium can be air and noncorrosive gases.
Basic Dimensions

Applicable Scope(m.Bar)

1x103 ~1.3x10-8

Valve Leak Rate(m.Bar.L/S)

≤1.3x10-9

Applicable Temperature(°C )

-25 ~+40

Air Source Pressure (MPa)

0.4 ~0.6

Flange Standard

GB4982

Install Position

Arbitrary

Power Voltage

Standard Technism: AC220V/50Hz
especially for AC110V
;DC24V;DC12V.

Signal Feedback

Standard Technism: without signal feedback
especially for microswitch

Overall Dimensions

Model

Diameter(DN)

ΦD

ΦB

W

H

h

A

bxb

ERV-J10(b)/KF

10

30

12.2

76

170

146

40

36x36

ERV-J16(b)/KF

16

30

17.2

76

170

146

40

36x36

ERV-J25(b)/KF

25

40

26.2

95

200

165

50

61x61

ERV-J40(b)/KF

40

55

41.2

112

232

186

65

80x80

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High Vacuum Valves

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